Measurement and control of temperature for atmospheric pressure chemical vapour deposition

Date

3-1994

Degree

Bachelor of Science in Applied Physics

College

College of Arts and Sciences (CAS)

Adviser/Committee Chair

Demetrio A Yco, Jr.

Abstract

The monitoring and control of substrate temperature is vital in the growth of thin films of desired quality. A system for Atmospheric Pressure Chemical Vapour Deposition (APCVD) is developed and characterized in this study. The APCVD system includes a reactor chamber and a method for monitoring and controlling reactor chamber temperatures. Temperature control is accomplished by resistive heating of an insulated heater element made from Kanthalux wire placed beneath the reactor chamber with the use of a 1000 Watt, 110 Volt Variac. Type K thermocouples attached to digital multimeters are used as temperature monitoring devices for the substrate holder and upper portion of the reaction chamber. These monitoring devices can measure temperature up to 700°C. they were calibrated prior to use with respect to another thermocouple sensor considered as the reference. Data gathering started at room temperature and nil input voltage. The heater was then supplied an initial voltage and then increased by 10 volts every 15 minutes. the temperatures of the substrate holder and upper portion of the reaction chamber were measured every 5 minutes for 15 minutes before the input voltage was varied. The maximum voltage applied to the heater was 60 volts and the maximum current through the heating element was 3.25 Amperes. Several configurations for the APCVD system were observed. the highest temperature attained by the substrate holder was 438°C while the upper portion of the chamber achieved a maximum temperature of 398°C. These values were obtained with an insulated, open chamber without any gas flow. The temperatures required for Chemical Vapour Deposition (CVD) range from values of 350°C-700°C making this type of reaction chamber feasible.

Language

English

Location

UPLB Main Library Special Collections Section (USCS)

Call Number

Thesis

Document Type

Thesis

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